Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. KEY TOPICS: Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology – all in a time-efficient and methodical manner. Concise background information is included from several engineering domains. A wealth of examples and problems solidify readers’ understanding of abstract concepts and provide ample opportunities for practicing critical thinking. MARKET: Ideal for readers new to Micro-Electro-Mechanical Systems (MEMS).